conventional serial micromanipulators that have long open kinematics chains are not suitable for precise manipulation in microscopic scale because of their deficiencies of low stiffness and articulation error accumulation 由于傳統(tǒng)串聯(lián)機(jī)構(gòu)形式存在著運(yùn)動(dòng)鏈長(zhǎng)、剛性差、誤差累積等缺陷,且操作精度有限,不能適應(yīng)mems技術(shù)發(fā)展的需要。